1、Designation:E150411Standard Practice forReporting Mass Spectral Data in Secondary Ion MassSpectrometry(SIMS)1This standard is issued under the fixed designation E1504;the number immediately following the designation indicates the year oforiginal adoption or,in the case of revision,the year of last r
2、evision.A number in parentheses indicates the year of last reapproval.Asuperscript epsilon()indicates an editorial change since the last revision or reapproval.1.Scope1.1 This practice provides the minimum information neces-sary to describe the instrumental,experimental,and datareduction procedures
3、used in acquiring and reporting second-ary ion mass spectrometry(SIMS)mass spectral data.1.2 The values stated in SI units are to be regarded asstandard.No other units of measurement are included in thisstandard.1.3 This standard does not purport to address all of thesafety concerns,if any,associate
4、d with its use.It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2.Referenced Documents2.1 ASTM Standards:2E673 Terminology Relating to Surface Analysis(Withdrawn2012)33.T
5、erminology3.1 DefinitionsFor definitions of terms used in thispractice,refer to Terminology E673.4.Summary of Practice4.1 Experimental conditions and reporting procedures thataffect SIMS mass spectral data are presented in order tostandardize the reporting of such data to facilitate comparisonswith
6、other laboratories and analytical techniques.5.Significance and Use5.1 This practice is intended for use in reporting theexperimental and data reduction procedures described in otherpublications.6.Information to be Reported6.1 Instrumentation:6.1.1 If a standard commercial SIMS instrument is used,sp
7、ecify the manufacturer,model number,and type of analyzerused.Specify the manufacturer and model number of anyaccessory or auxiliary equipment that would affect the datacontained within the mass spectrum(for example,additionalvacuum pumping attachments,primary ion mass filter,primaryion sources,elect
8、ron flood guns,etc.).If any nonstandardmodification has been made to the instrumentation,describethe modification in detail.6.1.2 If a noncommercial SIMS system is used,specify thecomponents composing the system(for example,ion gun,pumping system,vacuum chamber,and mass filter).Specifythe manufactur
9、er and model number if the components are ofcommercial origin.If the components are home-built,specifythem in such detail that their potential effect on the obtainedmass spectrum may be deduced by an individual experiencedin SIMS and vacuum technology.6.2 SpecimenDescribe the specimen in as much det
10、ail aspossible.Such factors would include,but are not limited to,sample preparation and handling,sample history,bulk andtrace composition,physical dimensions,sample homogeneity,crystallinity,and any preanalysis cleaning procedure used.Describe in detail the method of sample mounting.Describeany cond
11、uctive coating or grids placed on the sample forcharge compensation.If a substrate is used,include substratecomposition,purity,and any methods of cleaning.6.3 Experimental Conditions:6.3.1 Primary Ion Source and Ion Optical ColumnIf acommercial ion source is being used,then the manufacturerand model
12、 number should be specified.If the ion source is acustom design,then it should be described in detail andappropriate literature references given,if applicable.Thespecies extracted from the ion source must be specified.If theprimary ion column provides mass filtering,then the selectedmass-filtered sp
13、ecies must be specified.If there is no mass-filtering,then the purity of the material used for ion productionmust be specified.State the ion energy and the impact energyof the primary beam.State the angle of incidence of theprimary ion beam with respect to the surface normal of the1This practice is
14、under the jurisdiction of ASTM Committee E42 on SurfaceAnalysis and is the direct responsibility of Subcommittee E42.06 on SIMS.Current edition approved Nov.1,2011.Published November 2011.Originallyapproved in 1992.Last previous edition approved in 2006 as E1504 06.DOI:10.1520/E1504-11.2For referenc
15、ed ASTM standards,visit the ASTM website,www.astm.org,orcontact ASTM Customer Service at serviceastm.org.For Annual Book of ASTMStandards volume information,refer to the standards Document Summary page onthe ASTM website.3The last approved version of this historical standard is referenced onwww.astm
16、.org.Copyright ASTM International,100 Barr Harbor Drive,PO Box C700,West Conshohocken,PA 19428-2959.United States1 sample as well as the ion current(and the method by which thisis measured).State whether the ion beam is rastered and if so,state the dwell time,the spot size,and the total irradiated area.Specify the primary ion dose(ions-m2)that was used to obtainthe spectrum.If the primary ion beam is pulsed(that is,Time-of-Flight SIMS),details of the pulsing should be de-scribed(pulse width,repe