ImageVerifierCode 换一换
格式:PDF , 页数:9 ,大小:234.96KB ,
资源ID:191376      下载积分:10 积分
快捷下载
登录下载
邮箱/手机:
温馨提示:
快捷下载时,用户名和密码都是您填写的邮箱或者手机号,方便查询和重复下载(系统自动生成)。 如填写123,账号就是123,密码也是123。
特别说明:
请自助下载,系统不会自动发送文件的哦; 如果您已付费,想二次下载,请登录后访问:我的下载记录
支付方式: 支付宝扫码支付 微信扫码支付   
验证码:   换一换

加入VIP,免费下载
 

温馨提示:由于个人手机设置不同,如果发现不能下载,请复制以下地址【https://www.wnwk.com/docdown/191376.html】到电脑端继续下载(重复下载不扣费)。

已注册用户请登录:
账号:
密码:
验证码:   换一换
  忘记密码?
三方登录: QQ登录  

下载须知

1: 本站所有资源如无特殊说明,都需要本地电脑安装OFFICE2007和PDF阅读器。
2: 试题试卷类文档,如果标题没有明确说明有答案则都视为没有答案,请知晓。
3: 文件的所有权益归上传用户所有。
4. 未经权益所有人同意不得将文件中的内容挪作商业或盈利用途。
5. 本站仅提供交流平台,并不能对任何下载内容负责。
6. 下载文件中如有侵权或不适当内容,请与我们联系,我们立即纠正。
7. 本站不保证下载资源的准确性、安全性和完整性, 同时也不承担用户因使用这些下载资源对自己和他人造成任何形式的伤害或损失。

版权提示 | 免责声明

本文(ASTM_F_1711_-_96_2008.pdf)为本站会员(益****师)主动上传,蜗牛文库仅提供信息存储空间,仅对用户上传内容的表现方式做保护处理,对上载内容本身不做任何修改或编辑。 若此文所含内容侵犯了您的版权或隐私,请立即通知蜗牛文库(发送邮件至admin@wnwk.com或直接QQ联系客服),我们立即给予删除!

ASTM_F_1711_-_96_2008.pdf

1、Designation:F171196(Reapproved 2008)Standard Practice forMeasuring Sheet Resistance of Thin Film Conductors forFlat Panel Display Manufacturing Using a Four-Point ProbeMethod1This standard is issued under the fixed designation F1711;the number immediately following the designation indicates the year

2、 oforiginal adoption or,in the case of revision,the year of last revision.A number in parentheses indicates the year of last reapproval.Asuperscript epsilon()indicates an editorial change since the last revision or reapproval.1.Scope1.1 This practice describes methods for measuring the sheetelectric

3、al resistance of sputtered thin conductive films depos-ited on large insulating substrates,used in making flat panelinformation displays.It is assumed that the thickness of theconductive thin film is much thinner than the spacing of thecontact probes used to measure the sheet resistance.1.2 This sta

4、ndard is intended to be used with Test MethodF390.1.3 Sheet resistivity in the range 0.5 to 5000 ohms persquare may be measured by this practice.The sheet resistanceis assumed uniform in the area being probed.1.4 This practice is applicable to flat surfaces only.1.5 Probe pin spacings of 1.5 mm to 5

5、.0 mm,inclusive(0.059 to 0.197 in inclusive)are covered by this practice.1.6 The method in this practice is potentially destructive tothe thin film in the immediate area in which the measurementis made.Areas tested should thus be characteristic of thefunctional part of the substrate,but should be re

6、mote fromcritical active regions.The method is suitable for characteriz-ing dummy test substrates processed at the same time assubstrates of interest.1.7 The values stated in SI units are to be regarded as thestandard.The values given in parentheses are for informationonly.1.8 This standard does not

7、 purport to address all of thesafety concerns,if any,associated with its use.It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2.Referenced Documents2.1 ASTM Standards:2F3

8、90 Test Method for Sheet Resistance of Thin MetallicFilms With a Collinear Four-Probe Array3.Terminology3.1 Definitions:3.1.1 For definitions of terms used in this practice see TestMethod F390.4.Summary of Practice4.1 This practice describes the preferred means of applyingTest Method F390 to measure

9、 the electrical sheet resistance ofthin films on very large flat substrates.An array of four pointedprobes is placed in contact with the film of interest.Ameasuredelectrical current is passed between two of the probes,and theelectrical potential difference between the remaining twoprobes is determin

10、ed.The sheet resistance is calculated fromthe measured current and potential values using correctionfactors associated with the probe geometry and the probesdistance from the test specimens boundaries.4.2 The method of F390 is extended to cover staggeredin-line and square probe arrays.In all the des

11、igns,however,theprobe spacings are nominally equal.4.3 This practice includes a special electrical test for veri-fying the proper functioning of the potential measuring instru-ment(voltmeter),directions for making and using sheet resis-tance reference films,an estimation of measurement errorcaused b

12、y probe wobble in the probe supporting fixture,and aprotocol for reporting film uniformity.4.4 Two appendices indicate the computation methods em-ployed in deriving numerical relationships and correctionfactors employed in this practice,and in Test Method F390.1This practice is under the jurisdictio

13、n of ASTM Committee F01 on Electronicsand is the direct responsibility of Subcommittee F01.17 on Sputter Metallization.Current edition approved June 15,2008.Published July 2008.Originallyapproved in 1996.Last previous edition approved in 2002 as F1711 96(2002).DOI:10.1520/F1711-96R08.2For referenced

14、 ASTM standards,visit the ASTM website,www.astm.org,orcontact ASTM Customer Service at serviceastm.org.For Annual Book of ASTMStandards volume information,refer to the standards Document Summary page onthe ASTM website.Copyright ASTM International,100 Barr Harbor Drive,PO Box C700,West Conshohocken,

15、PA 19428-2959.United States1 5.Significance and Use5.1 Applying Test Method F390 to large flat panel substratespresents a number of serious difficulties not anticipated in thedevelopment of that standard.The following problems areencountered.5.1.1 The four-point probe method may be destructive to th

16、ethin film being measured.Sampling should therefore be takenclose to an edge or corner of the plate,where the film isexpendable.Special geometrical correction factors are thenrequired to derive the true sheet resistance.5.1.2 Test Method F390 is limited to a conventional col-linear probe arrangement,but a staggered collinear and squarearrays are useful in particular circumstances.Correction factorsare needed to account for nonconventional probe arrange-ments.5.1.3 Test Method F390 anticipates a

copyright@ 2008-2023 wnwk.com网站版权所有

经营许可证编号:浙ICP备2024059924号-2