1、 Electron Beam Microanalysis by D.R.Beaman and J.A.Isasi ASTM SPECIAL TECHNICAL PUBLICATION 506 List price:$3.75 04-506000-28 AMERICAN SOCIETY FOR TESTING AND MATERIALS 1916 Race Street,Philadelphia,Pa.19103 by the American Society for Testing and Materials 1972 Library of Congress Catalog Number:74
2、-189005(Second Printing,January 197i)NOTE The Society is not responsible,as a body for the statements or opinions advanced in this publication Printed in Baltimore,Md.Foreword In recent years the development of new scientific instruments and techniques has made microanalysis an essential and powerfu
3、l tool for the materials scien-tist.The ability to chemically characterize small,included particles or second-phase materials down to one micrometer(1 Mm)in diameter and to determine the nature of surfaces with a depth resolution below lOOA has led to the solution of serious materials problems and t
4、he development of new products and processes.This article,which is a review of the many techniques available,illustrates how the various techniques are related,when they can be most appropriately used and when they can be successfully combined in a single instrument.Such a review should:1)aid the ma
5、terials scientist in selecting the proper technique and instrument for his particular problem;2)guide the novice in his initial efforts in the field of microanalysis;and 3)provide the expert with a critical review and state-of-the-art description of the field.Particular emphasis is placed on the qua
6、ntitative capabilities of the various techniques so that the reader may obtain a full understanding of the capa-bilities and limitations of each.The problems associated with accuracy and precision in electron beam microanalysis are discussed so the investigator or user will be aware of potential pro
7、blems.The following instruments and techniques or combinations thereof are discussed:electron probe analyzer,transmission electron microscope,scanning electron microscope,Auger electron spectroscopy,energy dispersive spectrometer,ion mass analyzer,automated instruments and quantitative metallography
8、.Finally applications in many disciplines are presented to illustrate the vast potential of the techniques.Contents Part IFundamentals and Applications Introduction 2 The Electron Column 6 Electron Interactions in Solids 8 Wavelength Dispersive Spectrometers 11 Energy Dispersive Spectrometers 14 Com
9、bination Instruments 29 Auger Electron Spectroscopy 32 Ion Mass Analyzer and Ion Microprobe Analyzer 33 Comparison of Analytical Techniques 37 Automated Instruments 38 Applications 39 Suggestions for the Novice 46 Part IIExperimental Considerations and Quantitative Analysis Measurement of Accurate X
10、-Ray Intensity Ratios 50 Quantitative Analysis 56 Notes Added in Proof 68 Appendix 1 69 Appendix 2 71 Part IThe Fundamentals and Applications STP506-EB/Jan.1972 Electron Beam Microanalysis D.R.Beaman and J.A.sasi D.R.Beaman J.A.IsasI Donald Robert Beaman,senior research physicist,Dow Chemical Co.,El
11、ectrochemical-Metallurgical Laboratory,Midland,Mich.Dr.Beaman received his B.S.(1958),M.S.(1961),Ph.D.(1963)degrees from the Uni-versity of Illinois,Urbana,111.He is responsible for electron probe analysis.His major areas of interest include:the use of the electron probe and scanning electron micros
12、cope in materials science and biology and quanti-tative electron beam microanalysis.Jose Antonio Isasi,senior engineer,Westinghouse Electric Corp.,Large Turbine Div.,Lester,Pa.Mr.Isasi received his B.S.(1966)and M.S.(1968)degrees from the University of Illinois,Urbana,111.He is reponsible for the el
13、ectron optics section,materials engineering laboratory.His major areas of interest include:materials science,especially that involving physical metallurgy and the use of electron optics instrumentation in materials science.Introduction The Proven Usefulness of Chemical Microanalysis/The electron pro
14、be analyzer is a scientific instrument that,in a short period of time,has been successfully and widely used in many scientific disciplines and has contributed in a sig-nificant manner to improved living conditions and to the reservoir of scientific knowledge.These benefits have ac-crued,despite its
15、high initial cost and the high degree of competence required to operate,maintain,and fully under-stand the instrument and its capabilities,from the ability of the instrument to chemically analyze extremely small volumes of material,such as the nucleus of an individual white blood cell or a particle
16、in a precipitation hardened material.The electron probe analyzer,or EPA(not to be confused with the newly created Environmental Protection Agency),of which there are over 400 in the United States and over 700 worldwide,is used in research,development,and quality control in such diverse scientific areas as metallurgy,miner-alogy,criminology,biochemistry,pathology,zoology,agron-omy,physics,and electronics.While the instrument has made its greatest impact in the study of materials and min-erals,its