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ASTM_F_1845_-_08_2016.pdf

1、Designation:F184508(Reapproved 2016)Standard Test Method forTrace Metallic Impurities in Electronic Grade Aluminum-Copper,Aluminum-Silicon,and Aluminum-Copper-SiliconAlloys by High-Mass-Resolution Glow Discharge MassSpectrometer1This standard is issued under the fixed designation F1845;the number im

2、mediately following the designation indicates the year oforiginal adoption or,in the case of revision,the year of last revision.A number in parentheses indicates the year of last reapproval.Asuperscript epsilon()indicates an editorial change since the last revision or reapproval.1.Scope1.1 This test

3、 method determines the concentrations of tracemetallic impurities in high purity(99.99 wt.%pure,or purer,with respect to metallic trace impurities)aluminum-copper,aluminum-silicon and aluminum-copper-silicon alloys withmajor alloy constituents as follows:aluminumGreater than 95.0%copperLess or equal

4、 than 5.0%siliconLess or equal than 5.0%1.2 This test method pertains to analysis by magnetic-sectorglow discharge mass spectrometer(GDMS).1.3 This test method does not include all the informationneeded to complete GDMS analyses.Sophisticated computer-controlled laboratory equipment,skillfully used

5、by an experi-enced operator,is required to achieve the required sensitivity.This test method does cover the particular factors(for example,specimen preparation,setting of relative sensitivity factors,determination of detection limits,etc.)known by the respon-sible technical committee to effect the r

6、eliability of high purityaluminum analyses.1.4 This standard does not purport to address all of thesafety concerns,if any,associated with its use.It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory

7、limitations prior to use.2.Referenced Documents2.1 ASTM Standards:2E135 Terminology Relating to Analytical Chemistry forMetals,Ores,and Related MaterialsE1593 Guide forAssessing the Efficacy ofAir Care Productsin Reducing the Perception of Indoor Malodor3.Terminology3.1 Terminology in this test meth

8、od is consistent withTerminology E135.Required terminology specific to this testmethod,not covered in Terminology E135,is indicated in 3.2.3.2 Definitions:3.2.1 campaigna test procedure to determine the accuracyof the instrument,which was normally performed at thebeginning of the day or after the in

9、strument modification,orboth.3.2.2 reference samplematerial accepted as suitable foruse as a calibration/sensitivity reference standard by all partiesconcerned with the analyses.3.2.3 specimena suitably sized piece cut from a referenceor test sample,prepared for installation in the GDMS ionsource,an

10、d analyzed.3.2.4 test samplematerial(aluminum alloy)to be analyzedfor trace metallic impurities by this GDMS method.3.2.4.1 DiscussionGenerally the test sample is extractedfrom a larger batch(lot,casting)of product and is intended tobe representative of the batch.4.Summary of Test Method4.1 A specim

11、en is mounted in a plasma discharge cell.Atoms subsequently sputtered from the specimen surface areionized,and then focused as an ion beam through a double-focusing magnetic-sector mass separation apparatus.The massspectrum(the ion current)is collected as magnetic field oracceleration voltage,(or bo

12、th)is scanned.4.2 The ion current of an isotope at mass Miis the totalmeasured current,less contributions from all other interferingsources.Portions of the measured current may originate fromthe ion detector alone(detector noise).Portions may be due toincompletely mass resolved ions of an isotope or

13、 molecule withmass close to,but not identical with,Mi.In all such instances1This test method is under the jurisdiction of ASTM Committee F01 onElectronics and is the direct responsibility of Subcommittee F01.17 on SputterMetallization.Current edition approved May 1,2016.Published May 2016.Originally

14、approved in 1997.Last previous edition approved in 2008 as F1845 08.DOI:10.1520/F1845-08R16.2For referenced ASTM standards,visit the ASTM website,www.astm.org,orcontact ASTM Customer Service at serviceastm.org.For Annual Book of ASTMStandards volume information,refer to the standards Document Summar

15、y page onthe ASTM website.Copyright ASTM International,100 Barr Harbor Drive,PO Box C700,West Conshohocken,PA 19428-2959.United States1 the interfering contributions must be estimated and subtractedfrom the measured signal.4.2.1 If the source of interfering contributions to the mea-sured ion current

16、 at Micannot be determined unambiguously,the measured current less the interfering contributions fromidentified sources constitutes an upper bound of the detectionlimit for the current due to the isotope.4.3 The composition of the test specimen is calculated fromthe mass spectrum by applying a relative sensitivity factor(RSF(X/M)for each contaminant element,X,compared to thematrix element,M.RSFs are determined in a separate analysisof a reference material performed under the same analyticalcondi

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