1、 IEC/IEEE 62659 Edition 1.0 2015-09 INTERNA TIONAL STA NDA RD Nanomanufacturing Large scale manufacturing for nanoelectronics IEC/IEEE 62659:2015-09(en)Copyright International Electrotechnical Commission THIS PUBLICA TION IS COPYRIGHT PROTECTED Copyright 2015 IEC,Geneva,Switzerland Copyright 2015 IE
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12、al Commission IEC/IEEE 62659 Edit ion 1.0 2015-09 INTER NA TIONAL STA NDA R D Nanomanufacturing Large scale manufacturing for nanoelectronics INTERNATIONAL ELECTROTECHNICAL COMMISSION ICS 07.030;25.020 ISBN 978-2-8322-2915-6 Warning!Make sure that you obtained this publication from an authorized dis
13、tributor.R egist er ed tr ademar k of t he Int er national Electr ot echnical Commission Copyright International Electrotechnical Commission 2 IEC/IEEE 62659:2015 IEC/IEEE 2015 CONTENTS FOREWORD.3 INTRODUCTION.5 1 Scope.6 2 Normative references.6 3 Terms and definitions.6 4 Abbreviations.8 5 Nanomat
14、erials incorporation into electronics fabrication.9 5.1 General.9 5.2 Raw materials acquisition.10 5.3 Materials processing.11 5.4 Design.11 5.5 Fabrication.11 5.6 Test.11 5.7 End-use.11 6 Safety and environmental issues.11 Bibliography.12 Figure 1 Relationship between bottom-up,top-down and hybrid
15、device fabrication processes for nanoelectronics over length scales.9 Table 1 Bottom-up process for nanoelectronics.9 Table 2 Top-down process for nanoelectronics.9 Table 3 Comparison of CMOS processes with exemplary CNT electronics process.10 Copyright International Electrotechnical Commission IEC/
16、IEEE 62659:2015 3 IEC/IEEE 2015 INTERNATIONAL ELECTROTECHNICAL COMMISSION _ NANOMANUFACTURING LARGE SCALE MANUFACTURING FOR NANOELECTRONICS FOREWORD 1)The International Electrotechnical Commission(IEC)is a worldwide organization for standardization comprising all national electrotechnical committees(IEC National Committees).The object of IEC is to promote international co-operation on all questions concerning standardization in the electrical and electronic fields.To this end and in addition to