1、 IEC/TS 62622 Edition 1.0 2012-10 TECHNICAL SPECIFICATION Nanotechnologies Description,measurement and dimensional quality parameters of artificial gratings IEC/TS 62622:2012(E)Copyrighted material licensed to BR Demo by Thomson Reuters(Scientific),Inc.,downloaded on Nov-27-2014 by James Madison.No
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9、ance,please contact the Customer Service Centre:csciec.ch.Copyrighted material licensed to BR Demo by Thomson Reuters(Scientific),Inc.,downloaded on Nov-27-2014 by James Madison.No further reproduction or distribution is permitted.Uncontrolled when printed.IEC/TS 62622 Edition 1.0 2012-10 TECHNICAL
10、SPECIFICATION Nanotechnologies Description,measurement and dimensional quality parameters of artificial gratings INTERNATIONAL ELECTROTECHNICAL COMMISSION W ICS 07.030 PRICE CODE ISBN 978-2-83220-394-1 Warning!Make sure that you obtained this publication from an authorized distributor.Copyrighted ma
11、terial licensed to BR Demo by Thomson Reuters(Scientific),Inc.,downloaded on Nov-27-2014 by James Madison.No further reproduction or distribution is permitted.Uncontrolled when printed.2 TS 62622 IEC:2012(E)CONTENTS FOREWORD.4 INTRODUCTION.6 1 Scope.7 2 Normative references.7 3 Terms and definitions
12、.7 3.1 Basic terms.7 3.2 Grating terms.10 3.3 Grating types.11 3.4 Grating quality parameter terms.14 3.5 Measurement method categories for grating characterization.17 4 Symbols and abbreviated terms.18 5 Grating calibration and quality characterization methods.18 5.1 Overview.18 5.2 Global methods.
13、18 5.3 Local methods.19 5.4 Hybrid methods.20 5.5 Comparison of methods.20 5.6 Other deviations of grating features.21 5.6.1 General.21 5.6.2 Out of axis deviations.21 5.6.3 Out of plane deviations.22 5.6.4 Other feature deviations.22 5.7 Filter algorithms for grating quality characterization.23 6 R
14、eporting of grating characterization results.23 6.1 General.23 6.2 Grating specifications.24 6.3 Calibration procedure.24 6.4 Grating quality parameters.24 Annex A(informative)Background information and examples.25 Annex B(informative)Bravais lattices.34 Bibliography.38 Figure 1 Example of a trapezo
15、idal line feature on a substrate.8 Figure 2 Examples of feature patterns.9 Figure 3 Examples of 1D line gratings.12 Figure 4 Example of 2D gratings.13 Figure A.1 Result of a calibration of a 280 mm length encoder system which was used as a transfer standard in an international comparison 31.27 Figur
16、e A.2 Filtered(linear profile Spline filter with c=25 mm)results of Figure A.1.28 Figure A.3 Calibration of a 1D grating by a metrological SEM.30 Figure A.4 Calibration of pitch and straightness deviations on a 2D grating by a metrological SEM.31 Copyrighted material licensed to BR Demo by Thomson Reuters(Scientific),Inc.,downloaded on Nov-27-2014 by James Madison.No further reproduction or distribution is permitted.Uncontrolled when printed.TS 62622 IEC:2012(E)3 Figure A.5 Results of an int