1、第 52 卷 第 6 期 表面技术 2023 年 6 月 SURFACE TECHNOLOGY 235 收稿日期：20220526；修订日期：20221123 Received：2022-05-26；Revised：2022-11-23 基金项目：国家自然科学基金（U2141210，51975561）；中国科学院青年创新促进会优秀会员计划（Y202084）Fund：National Natural Science Foundation of China(U2141210,51975561);Youth Innovation Promotion Association of Chinese Ac
2、ademy of Sciences(Y202084)作者简介：刘进龙（1994），男，硕士生，主要研究方向为先进高分子材料。Biography：LIU Jin-long(1994-),Male,Postgraduate,Research focus:advanced polymer material.通讯作者：张定军（1972），男，博士，教授，主要研究方向为高分子材料及其相关材料。Corresponding author：ZHANG Ding-jun(1972-),Male,Doctor,Professor,Research focus:polymer materials and relat
3、ed materials.通讯作者：刘晓红（1977），女，博士，副研究员，主要研究方向为表面工程与摩擦学。Corresponding author：LIU Xiao-hong(1977-),Female,Doctor,Associate researcher,Research focus:surface engineering and tribology.引文格式：刘进龙,李红轩,吉利,等.TiB2掺杂 WS2复合薄膜的宽温域摩擦学性能研究J.表面技术,2023,52(6):235-245.LIU Jin-long,LI Hong-xuan,JI Li,et al.Tribological
4、Properties of TiB2 Doped WS2 Composite Films in Wide Temperature RangeJ.Surface Technology,2023,52(6):235-245.TiB2掺杂 WS2复合薄膜的宽温域摩擦学性能研究 刘进龙1,2，李红轩2，吉利2，刘晓红2，张定军1（1.兰州理工大学 材料科学与工程学院，兰州 730030；2.中国科学院兰州化学物理研究所 固体润滑国家重点实验室，兰州 730000）摘要：目的目的 探究 TiB2溅射电流（即 TiB2含量）对 WS2/TiB2复合薄膜在宽温域（25500）下摩擦学性能的影响。方法方法 采
5、用非平衡磁控溅射技术制备 WS2/TiB2复合薄膜。通过场发射扫描电子显微镜（FESEM）、高分辨率透射电子显微镜（HRTEM）观察薄膜的形貌及结构；通过 X 射线衍射仪（XRD）、X 射线光电子能谱仪（XPS）表征薄膜结构；通过纳米压痕仪（Anton Paar，NHT2）评价薄膜的机械性能；利用高温球盘摩擦磨损试验机（THT01，03591）测试薄膜的摩擦学性能；采用光学显微镜（Olympus，STM6）、三维轮廓仪（Micro XAM800）观察磨痕及磨斑形貌，通过 HRTEM 分析磨痕和磨斑的结构。结果结果 TiB2掺杂使WS2薄膜由高度结晶态向非晶态转变，增大了薄膜的致密度并提高了其机
6、械性能。随着 TiB2溅射电流的增大，复合薄膜的摩擦因数和磨损率呈先下降后上升的趋势。随着试验温度的升高，复合薄膜的摩擦因数先降低后升高，但磨损率一直逐渐升高。TiB2溅射电流为 1.5 A 时，制备的复合薄膜在宽温域（25500）具有较低的摩擦因数和磨损率。300 条件下，TiB2溅射电流为 1.5 A 时制备的复合薄膜在摩擦剪切力作用下重新定向形成了 TiB2(101)晶体取向和平行于滑动方向的 WS2(002)晶体取向，并在高环境温度和摩擦热作用下氧化形成了润滑相 TiO2(001)晶体结构。结论结论 TiB2溅射电流为 1.5 A 时制备的复合薄膜具有优异的宽温域摩擦学性能。薄膜致密的
7、非晶结构、高的硬度和弹性模量，以及在摩擦剪切力和高温氧化作用下重新结晶取向是低摩擦磨损的关键。关键词：WS2/TiB2复合薄膜；宽温域；机械性能；摩擦磨损；晶体取向 中图分类号：TB383.2 文献标识码：A 文章编号：1001-3660(2023)06-0235-11 DOI：10.16490/ki.issn.1001-3660.2023.06.020 Tribological Properties of TiB2 Doped WS2 Composite Films in Wide Temperature Range LIU Jin-long1,2,LI Hong-xuan2,JI Li2,
8、LIU Xiao-hong2,ZHANG Ding-jun1(1.School of Material Science and Engineering,Lanzhou University of Technology,Lanzhou 730030,China;236 表 面 技 术 2023 年 6 月 2.State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China)ABSTRACT:The wor
9、k aims to investigate the effect of TiB2 sputtering current(the content of TiB2)on tribological properties of WS2/TiB2 composite films in wide temperature range(25-500).WS2/TiB2 composite films were prepared by non-equilibrium magnetron sputtering.The morphology and structure of the films were obser
10、ved by field emission scanning electron microscopy(FESEM)and high resolution transmission electron microscope(HRTEM).The structure of the films was characterized by X-ray diffractometer(XRD)and X-ray photoelectron spectrometer(XPS).The mechanical properties of the films were evaluated by nanoindenta
11、tion instrument(Anton Paar,NHT2).The tribological properties of the films were tested by a high temperature ball disc friction and wear tester(THT01,03591).Optical microscope(Olympus,STM6)and three-dimensional profilometer(Micro XAM-800)were used to observe the morphology of wear tracks and wear sca
12、rs,and HRTEM was used to analyze the structure of wear tracks and wear scars.TiB2 doped WS2 films changed from highly crystalline to amorphous state,and the surface morphology of composite films changed from worm-like to island-like,improving the density and mechanical properties.With the increase o
13、f TiB2 sputtering current,the friction coefficient and wear rate of the composite films decreased firstly and then increased.In addition,as the test temperature rose,the friction coefficient of the composite films firstly decreased and then increased,but the wear rate was gradually increasing.Among
14、them,sputtering current of TiB2 with 1.5 A contributed to the lowest friction coefficient and wear rate in wide temperature range(25-500).The friction coefficients of composite films at 100 and 300 at sputtering current with 0-2.5 A were lower than those at 25 and 500,while the friction coefficient
15、of composite film prepared with TiB2 sputtering current of 4.0 A was opposite.By analyzing the wear tracks and corresponding wear scars of composite films prepared with sputtering current of 1.5 A at different experimental temperature,it was found that the furrow on the surface of wear tracks was ob
16、vious at 25.When the temperature rose to 100 and 300,the furrow on the surface of the wear tracks became shallow,and the friction coefficient decreased and remained stable,respectively to about 0.015 and 0.021.However,the depth,width and wear rate of wear tracks slightly increased,and the friction mechanism was mainly abrasive wear and adhesive wear.When the experimental temperature reached 500,the plastic deformation of the film surface and subsurface increased,the damage was serious,there was