1、 ASME B89.1.8-2011Performance Evaluation of Displacement-Measuring Laser InterferometersAN AMERICAN NATIONAL STANDARDREAFFIRMED 2021ASME B89.1.8-2011PerformanceEvaluation ofDisplacement-Measuring LaserInterferometersAN AMERICAN NATIONAL STANDARDThree Park Avenue New York,NY 10016 USADate of Issuance
2、:March 30,2012This Standard will be revised when the Society approves the issuance of a new edition.ASME issues written replies to inquiries concerning interpretations of technical aspects of thisStandard.Periodically certain actions of the ASME B89 Committee may be published as Cases.Casesand inter
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11、 Mechanical EngineersThree Park Avenue,New York,NY 10016-5990Copyright 2012 byTHE AMERICAN SOCIETY OF MECHANICAL ENGINEERSAll rights reservedPrinted in U.S.A.CONTENTSForeword.ivCommittee Roster.vCorrespondence With the B89 Committee.vi1Scope.12Definitions.13System Performance Evaluation:General Cons
12、iderations.54Test Procedure Laser Interferometer Comparison Test.75Verifying Test Performance,Estimating Bias in the Test,and Uncertainty ofResults.166Measurement Evaluation.197References.22Figure2-1Schematic Illustration of the Abbe Offset.2Tables4.2-1Recommended Target Positions.84.7.2-1Sensitivit
13、y Coefficients Associated With LDE.124.8-1Wavelength Corrections(Parts in 106)for Low Humidity Air(25%RH).134.8-2Wavelength Corrections(Parts in 106)for Medium Humidity Air(50%RH).134.8-3Wavelength Corrections(Parts in 106)for High Humidity Air(75%RH).144.8-4Combinations of Environmental Conditions.
14、14Forms4.10-1Reporting Results for Intercomparison Test.174.10-2Reporting Results for Sensor Calibration.174.10-3Reporting Overall Result.176-1Sample Uncertainty Budget:Errors Predictable by Manufacturer.206-2Sample Uncertainty Budget:Combining Manufacturers Reported UncertaintyWith Additional Sourc
15、es of Error for a Metrology Laboratory.21Nonmandatory AppendicesAUncertainty Budget for Interferometric Length Measurements.25BMethods for Comparing Two Interferometer Systems.33CPerforming Accurate Linear Measurements With a Laser InterferometerSystem Best Procedures and Practices.41DRetesting of I
16、nterferometer Systems.49EAC Interferometers Versus DC Interferometers.50FSuggestions for Testing the Master Interferometer and EstimatingUncertainty.51iiiFOREWORDLaser interferometry has become the preferred way to measure machine tool and coordinatemeasuring machine(CMM)linear displacement accuracy.Laser interferometers are also used asthe main incremental radius-measuring devices in other dimensional measuring systems,suchas laser trackers.The laser interferometer is preferred because of its v
