1、Designation:E163610Standard Practice forAnalytically Describing Depth-Profile and Linescan-ProfileData by an Extended Logistic Function1This standard is issued under the fixed designation E1636;the number immediately following the designation indicates the year oforiginal adoption or,in the case of
2、revision,the year of last revision.A number in parentheses indicates the year of last reapproval.Asuperscript epsilon()indicates an editorial change since the last revision or reapproval.1.Scope1.1 This practice describes a systematic method for analyz-ing depth-profile and linescan data and for acc
3、urately charac-terizing the shape of an interface region or topographic feature.The profile data are described with an appropriate analyticfunction,and the parameters of this function define theposition,width,and any asymmetry of the interface or feature.The use of this practice is recommended in or
4、der that theshapes of composition profiles of interfaces or of linescans oftopographic features acquired with different instruments ortechniques can be unambiguously compared and interpreted.1.2 This practice is intended to be used for two purposes.First,it can be used to describe the shape of depth
5、-profilesobtained at an interface between two dissimilar materials thatmight be measured by common surface-analysis techniquessuch as Auger electron spectroscopy,secondary-ion massspectrometry,and X-ray photoelectron spectroscopy.Second,itcan be used to describe the shape of linescans across adetect
6、able topographic feature such as a step or a feature on asurface that might be measured by a surface-analysistechnique,scanning electron microscopy,or scanning probemicroscopy.The practice is particularly valuable for determin-ing the position and width of an interface in a depth profile orof a feat
7、ure on a surface and in assessments of the width as anindication of the sharpness of the interface or feature(acharacteristic of the material system being measured)or of theachieved depth resolution of the profile or the lateral resolutionof the linescan(a characteristic of the particular analytical
8、technique and instrumentation).1.3 The values stated in SI units are to be regarded asstandard.No other units of measurement are included in thisstandard.1.4 This standard does not purport to address all of thesafety concerns,if any,associated with its use.It is theresponsibility of the user of this
9、 standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2.Referenced Documents2.1 ASTM Standards:2E673 Terminology Relating to Surface Analysis(Withdrawn2012)3E1127 Guide for Depth Profiling in Auger Electron Spec-trosco
10、pyE1162 Practice for Reporting Sputter Depth Profile Data inSecondary Ion Mass Spectrometry(SIMS)E1438 Guide for Measuring Widths of Interfaces in SputterDepth Profiling Using SIMS2.2 ISO Standards:4ISO 18115 Surface Chemical Snalysis Vocabulary,2001;Amd.1:2006,Amd.2:2007ISO 18516 Surface Chemical A
11、nalysis Auger ElectronSpectroscopy and X-Ray Photoelectron Spectroscopy Determination of Lateral Resolution,20063.Terminology3.1 DefinitionsFor definitions of terms used in thispractice,see Terminology E673 and ISO 18115.3.2 Definitions of Terms Specific to This Standard:3.2.1 Throughout this practi
12、ce,three regions of a sigmoidalprofile will be referred to as the pre-interface,interface,andpost-interface regions.These terms are not dependent onwhether a particular interface or feature profile is a growth ora decay curve.The terms pre-and post-are taken in the senseof increasing values of the i
13、ndependent variable X,the depth(for a depth profile)or the lateral position on the surface(for alinescan).1This practice is under the jurisdiction of ASTM Committee E42 on SurfaceAnalysis and is the direct responsibility of Subcommittee E42.08 on Ion BeamSputtering.Current edition approved Jan.1,201
14、0.Published March 2010.Originallyapproved in 1999.Last previous version approved in 2004 as E1636 04.DOI:10.1520/E1636-10.2For referenced ASTM standards,visit the ASTM website,www.astm.org,orcontact ASTM Customer Service at serviceastm.org.For Annual Book of ASTMStandards volume information,refer to
15、 the standards Document Summary page onthe ASTM website.3The last approved version of this historical standard is referenced onwww.astm.org.4Available from International Organization for Standardization(ISO),1,ch.dela Voie-Creuse,Case postale 56,CH-1211,Geneva 20,Switzerland,http:/www.iso.ch.Copyrig
16、ht ASTM International,100 Barr Harbor Drive,PO Box C700,West Conshohocken,PA 19428-2959.United States1 4.Summary of Practice4.1 Depth-profile data for an interface(that is,signal inten-sity or composition versus depth)or linescan data(that is,signal intensity or composition versus position on a surface)are fitted to an analytic function,an extended form of thelogistic function,in order to describe the shape of suchprofiles.5,6Least-squares fitting techniques are employed todetermine the values o
