1、Designation:F137592(Reapproved 2012)Standard Test Method forEnergy Dispersive X-Ray Spectrometer(EDX)Analysis ofMetallic Surface Condition for Gas Distribution SystemComponents1This standard is issued under the fixed designation F1375;the number immediately following the designation indicates the ye
2、ar oforiginal adoption or,in the case of revision,the year of last revision.A number in parentheses indicates the year of last reapproval.Asuperscript epsilon()indicates an editorial change since the last revision or reapproval.INTRODUCTIONSemiconductor clean rooms are serviced by high-purity gas di
3、stribution systems.This test methodpresents a procedure that may be applied for the evaluation of one or more components considered foruse in such systems.1.Scope1.1 This test method establishes a procedure for comparingthe elemental composition of normal surfaces with any defectsfound on the surfac
4、es of metal tubing,fittings,valves,or anymetal component.1.2 This test method applies to all steel surfaces of compo-nents such as tubings,connectors,regulators,and valves,regardless of size,style,or type.1.3 Limitations:1.3.1 This test method is intended for use by scanningelectron microscope/energ
5、y dispersive x-ray spectrometer(SEM/EDX)operators with skill level typically achieved overa twelve-month period.1.3.2 SEM used for this study should conform to thoselimitations outlined in Test Method F1372 and should have aminimum point-to-point resolution of 30 nm.1.4 The values stated in SI units
6、 are to be regarded as thestandard.The inch-pound units given in parentheses are forinformation only.1.5 This standard does not purport to address all of thesafety concerns,if any,associated with its use.It is theresponsibility of the user of this standard to establish appro-priate safety and health
7、 practices and determine the applica-bility of regulatory limitations prior to use.Specific hazardstatements are given in Section 6.2.Referenced Documents2.1 ASTM Standards:2F1372 Test Method for Scanning Electron Microscope(SEM)Analysis of Metallic Surface Condition for GasDistribution System Compo
8、nents3.Terminology3.1 Definitions of Terms Specific to This Standard:3.1.1 normal surfacean area of the sample that does notexhibit any visible defect when viewed under the stipulatedSEM magnification.Normal surface is used to provide abaseline for comparison with any area exhibiting a defect.3.1.2
9、sample anglethe angle measured normal to theincoming electron beam.3.1.3 standard conditions101.3 kPa,0.0C(14.73 psia,32.0F).3.1.4 working distancethe measured distance from thebottom of the objective lens to the sample.4.Significance and Use4.1 The purpose of this test method is to define a procedu
10、refor testing components being considered for installation into ahigh-purity gas distribution system.Application of this testmethod is expected to yield comparable data among compo-nents tested for purposes of qualification for this installation.5.Apparatus5.1 Materials:1This test method is under th
11、e jurisdiction of ASTM Committee F01 onElectronics and is the direct responsibility of Subcommittee F01.10 on Contamina-tion Control.Current edition approved July 1,2012.Published August 2012.Originallyapproved in 1992.Last previous edition approved in 2005 as F137592(2005).DOI:10.1520/F1375-92R12.2
12、For referenced ASTM standards,visit the ASTM website,www.astm.org,orcontact ASTM Customer Service at serviceastm.org.For Annual Book of ASTMStandards volume information,refer to the standards Document Summary page onthe ASTM website.Copyright ASTM International,100 Barr Harbor Drive,PO Box C700,West
13、 Conshohocken,PA 19428-2959.United States1 5.1.1 Mounting Stubs,specific to the instrument used arerequired.5.1.1.1 Samples shall not be coated with a conductive thinlayer(for example,gold or carbon).5.1.2 Conductive Paste/Tape,that will provide a conductivepath.Use any means of fixing the sample to
14、 a stub.Care shouldbe taken not to contaminate the area of interest.5.1.3 Adhesives,used to attach samples to sample stubs areto be vacuum stable.5.2 Instrumentation:5.2.1 Scanning Electron Microscope(SEM)Any highresolution commercially available SEM with photographiccapabilities of a 100 cm2image m
15、ay be used for theseanalyses.5.2.2 Instrument Operating Parameters,shall be as fol-lows:accelerating voltage,20 KeV;final aperture size nominal200 m or less;and working distance and sample tilt,asappropriate to the EDX detector.5.2.2.1 SEM instrument operating parameters shall be suchthat collection
16、 efficiency for the EDX spectrometer is opti-mized.5.2.3 EDX Spectrometer,capable of full width half maxi-mum(FWHM)resolution of 170 eV or less(for MnK),andcapable of detecting all elements with an atomic numbergreater than or equal to that of sodium(Na).5.2.4 Printer or Plotter,capable of accurate spectral repro-duction(linear-linear)is required.6.Hazards6.1 Observe all normal and acceptable precautions regard-ing use of high voltage,X-ray producing equipment.Observestandard and routine cryogen
