1、Designation:F137692(Reapproved 2012)Standard Guide forMetallurgical Analysis for Gas Distribution SystemComponents1This standard is issued under the fixed designation F1376;the number immediately following the designation indicates the year oforiginal adoption or,in the case of revision,the year of
2、last revision.A number in parentheses indicates the year of last reapproval.Asuperscript epsilon()indicates an editorial change since the last revision or reapproval.INTRODUCTIONSemiconductor clean rooms are serviced by high-purity gas distribution systems.This guidepresents a procedure that may be
3、applied for the evaluation of one or more components considered foruse in such systems.1.Scope1.1 This guide covers corrosion resistant metallic alloys ofthe general class stainless steel,containing chromium,nickel,manganese,and silicon as major alloying additions and possi-bly molybdenum,that are q
4、ualified or specified for the mate-rials of components used in high-purity gas supply systems forthe semiconductor industry.This guide is primarily intendedfor testing to determine conformance to applicable compositionand metallurgical specifications as stated in supplier productspecifications or cu
5、stomer purchase specifications,or both.1.2 Elements analyzed and reported in this guide are asfollows:1.2.1 The alloying additions chromium,nickel,and molyb-denum(if specified in alloy,as in type 316L),1.2.2 The minor elements and residuals manganese,silicon,copper,cobalt,and stabilizers such as tit
6、anium and columbium(niobium),if present,1.2.3 Carbon,sulfur and phosphorus,1.2.4 Nitrogen and oxygen gases,1.2.5 Any additional minor element additions that may bemade as part of the melting and casting practice,such asaluminum and calcium,1.2.6 Available standard analytical and reporting techniques
7、are described for these elements.1.3 Metallurgical characteristics to be analyzed and reportedare inclusion contents,grain structure,mechanical properties,and intergranular corrosion susceptibility.1.4 Limitations:1.4.1 This guide is limited to corrosion resistant metalalloys of the general class st
8、ated in the Scope.1.4.2 The test methods cited in this guide are not intended topreclude the use of other generally accepted techniques ofdemonstrated equivalent or superior precision and bias.1.4.3 Inclusion of testing and analysis procedures for anygiven element or metallurgical characteristic in
9、this guide is notto be construed as being a requirement for incorporation of thatelement or metallurgical characteristic into any specifications.1.5 The values stated in SI units are to be regarded as thestandard.The inch-pound units given in parentheses are forinformation only.1.6 This standard doe
10、s not purport to address all of thesafety concerns,if any,associated with its use.It is theresponsibility of the user of this standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory limitations prior to use.2.Referenced Documents2.1 ASTM Standard
11、s:2A262 Practices for Detecting Susceptibility to IntergranularAttack in Austenitic Stainless SteelsA370 Test Methods and Definitions for Mechanical Testingof Steel ProductsA479/A479M Specification for Stainless Steel Bars andShapes for Use in Boilers and Other Pressure VesselsA484/A484M Specificati
12、on for General Requirements forStainless Steel Bars,Billets,and Forgings2A751 Test Methods,Practices,and Terminology for Chemi-cal Analysis of Steel ProductsE8 Test Methods for Tension Testing of Metallic MaterialsE45 Test Methods for Determining the Inclusion Content ofSteel1This guide is under the
13、 jurisdiction of ASTM Committee F01 on Electronicsand is the direct responsibility of Subcommittee F01.10 on Contamination Control.Current edition published July 1,2012.Published August 2012.Originallyapproved in 1992.Last previous edition approved in 2005 as F137692(2005).DOI:10.1520/F1376-92R12.2F
14、or referenced ASTM standards,visit the ASTM website,www.astm.org,orcontact ASTM Customer Service at serviceastm.org.For Annual Book of ASTMStandards volume information,refer to the standards Document Summary page onthe ASTM website.Copyright ASTM International,100 Barr Harbor Drive,PO Box C700,West
15、Conshohocken,PA 19428-2959.United States1 E112 Test Methods for Determining Average Grain SizeE353 Test Methods for Chemical Analysis of Stainless,Heat-Resisting,Maraging,and Other Similar Chromium-Nickel-Iron AlloysE572 Test Method for Analysis of Stainless and Alloy Steelsby X-ray Fluorescence Spe
16、ctrometryE1019 Test Methods for Determination of Carbon,Sulfur,Nitrogen,and Oxygen in Steel,Iron,Nickel,and CobaltAlloys by Various Combustion and Fusion TechniquesE1086 Test Method for Atomic Emission Vacuum Spectro-metric Analysis of Stainless Steel by Point-to-Plane Ex-citation TechniqueE1122 Practice for Obtaining JK Inclusion Ratings UsingAutomatic Image Analysis(Withdrawn 2006)3E1245 Practice for Determining the Inclusion or Second-Phase Constituent Content of Metals by Automatic ImageAnal
