1、Designation:F137393(Reapproved 2012)Standard Test Method forDetermination of Cycle Life of Automatic Valves for GasDistribution System Components1This standard is issued under the fixed designation F1373;the number immediately following the designation indicates the year oforiginal adoption or,in th
2、e case of revision,the year of last revision.A number in parentheses indicates the year of last reapproval.Asuperscript epsilon()indicates an editorial change since the last revision or reapproval.INTRODUCTIONSemiconductor clean rooms are serviced by high-purity gas distribution systems.This test me
3、thodpresents a procedure that may be applied for the evaluation of one or more components considered foruse in such systems.1.Scope1.1 This test method covers the testing of automatic valvesfor cycle life utilizing static,no-flow conditions.This no-flowcondition is felt to be a realistic test to det
4、ermine the valvescycle life.1.2 This test method applies to automatically operatedvalves.It is intended to measure the cycle life of the valve itselfincluding the seat and body sealing.It does not include cycletesting of the actuator.Testing must include both pressuretesting and helium leak testing
5、and must include vacuum testconditions when appropriate.This test method may be appliedto a broad range of valve sizes.1.3 Limitations:1.3.1 This test is not designed to evaluate the performanceof the actuator.This test method addresses the gas systemcontamination aspects of the valve performance,th
6、at is,seatand body leakage and diaphragm or bellows failure.If theactuator fails during the evaluation,the valve is deemed as afailure.1.3.2 While the requirements of a valves performancemight include items such as particulate generation levels,thistest method only attempts to evaluate cycle life an
7、d perfor-mance degradation as they relate to the ability of the valve tooperate and shut off flow.1.3.3 This test method is written with the assumption thatthe operator understands the use of the apparatus at a levelequivalent to six months of experience.1.4 The values stated in SI units are to be r
8、egarded as thestandard.The inch-pound units given in parentheses are forinformation only.1.5 This standard does not purport to address all of thesafety concerns,if any,associated with its use.It is theresponsibility of the user of this standard to establish appro-priate safety and health practices a
9、nd determine the applica-bility of regulatory limitations prior to use.Specific hazardstatements are given in Section 7.2.Referenced Document2.1 SEMATECH Standard:2.1.1 Test Method for Determination of Helium Leak Ratefor Gas Distribution Systems Components,Provisional SE-MASPEC#90120391 B-STD.Feb.2
10、2,1993.23.Terminology3.1 Definitions of Terms Specific to This Standard:3.1.1 actuation cycleoperation of valve from fully openedto fully closed and back to fully opened.3.1.2 actuator a gas(compressed air nitrogen)-operateddevice connected to the valve stem to open and close the valve.3.1.3 actuato
11、r pressurerange of actuator gas line pressurerequired to fully open and close the valve.3.1.4 automatic valvea valve with an actuation device thatcan be operated remotely,such as a pneumatically or electri-cally controlled valve.3.1.5 cycle lifethe cycle life of a valve involves twocharacteristics:c
12、atastrophic valve failure,that is a single value;and a degraded performance,that is,a plot of helium leak rateversus cycles.3.1.6failurethe termination of the ability of the valve toperform its required function.3.1.7 failure modethe mode by which a failure is observedto occur.1This test method is u
13、nder the jurisdiction of ASTM Committee F01 onElectronics and is the direct responsibility of Subcommittee F01.10 on Contamina-tion Control.Current edition approved July 1,2012.Published August 2012.Originallyapproved in 1992.Last previous edition approved in 2005 as F1373 93(2005).DOI:10.1520/F1373
14、-93R12.2Available from SEMATECH,2706 Montopolis Dr.,Austin,TX 78741-6499.Copyright ASTM International,100 Barr Harbor Drive,PO Box C700,West Conshohocken,PA 19428-2959.United States1 3.1.7.1 DiscussionFailure mode types include a cata-strophic failure that is both sudden and complete and degradedfai
15、lure that is gradual,partial,or both.3.1.8 standard conditions101.3 kPa,0.0C(14.73 psia,32.0F).3.1.9 valveany component designed to provide positiveshutoff of fluid media with the capability of being externallyoperated.4.Significance and Use4.1 The purpose of this test method is to define a procedur
16、efor testing components being considered for installation into ahigh-purity gas distribution system.Application of this testmethod is expected to yield comparable data among compo-nents tested for the purposes of qualification for this installa-tion.5.Apparatus5.1 Helium Mass Spectrometer Leak Detector.5.2 Cycle Counter.5.3 Upstream and Downstream Pressure Indicators orTransducers,capable of handling the test pressure ranges;avacuum pump for vacuum service valves,an isolation valveand test valve
