1、Designation:F159495(Reapproved 2011)Standard Specification forPure Aluminum(Unalloyed)Source Material for VacuumCoating Applications1This standard is issued under the fixed designation F1594;the number immediately following the designation indicates the year oforiginal adoption or,in the case of rev
2、ision,the year of last revision.A number in parentheses indicates the year of last reapproval.Asuperscript epsilon()indicates an editorial change since the last revision or reapproval.1.Scope1.1 This specification covers pure aluminum metal(unal-loyed)for use as raw material for making evaporation s
3、ources,sputtering targets,and superconducting wires.1.2 This specification sets purity grade levels,physicalattributes,analytical methods,and packaging requirements.2.Referenced Documents2.1 ASTM Standards:2E29 Practice for Using Significant Digits in Test Data toDetermine Conformance with Specifica
4、tionsE112 Test Methods for Determining Average Grain Size3.Terminology3.1 Definitions:3.1.1 raw material lota quantity of material that is melted,consolidated,or purified,or both,in one equipment run as anominally uniform batch of metal.4.Classification4.1 Grades of aluminum are defined in Table 1.4
5、.2 Purity and total metallic impurity levels are based uponelements listed in Table 2.5.Ordering Information5.1 Orders for these products shall include the following:5.1.1 Grade(see 4.1).5.1.2 Configuration(see 8.1).5.1.3 Whether or not certification is required(see 12.1).5.1.4 Whether or not a samp
6、le representative of the finishedproduct is required to be provided by the supplier to thepurchaser.6.Impurities6.1 The suite of metallic elements to be assayed for isdefined in Table 2.Acceptable analysis methods are specifiedin Section 12.Elements not detected will be counted andreported as presen
7、t at the detection limit.Additional elementsmay be analyzed and reported,as agreed upon betweensupplier and purchaser,but these shall not be counted indefining the grade designation.6.2 Acceptable concentration limits for individual elementsand analytical techniques shall be agreed upon between thes
8、upplier and the purchaser.7.Physical Properties7.1 Grain size and measurement method for grain size shallbe agreed upon between the supplier and the purchaser.Whenthe grain morphology is equiaxied,refer to Practice E112.8.Dimensions8.1 Each product shall conform to an appropriate engineer-ing drawin
9、g.8.2 Nominal dimensions,tolerances,and other attributesshall be agreed upon between the supplier and the purchaser.9.Workmanship,Finish,and Appearance9.1 Workmanship,finish,and appearance shall be agreedupon between the supplier and the purchaser.9.2 Surface must be free of any contaminates such as
10、 moldrelease,dirt,or oils that could adversely affect the purity of thematerial when remelted,unless otherwise agreed upon betweensupplier and purchaser.10.Sampling10.1 Analyses for impurities shall be performed on a samplethat is representative of the finished material lot provided bythe supplier.1
11、1.Analytical Methods11.1 Analysis for impurities in Table 2 and 6.2 shall beperformed using optical emission spectroscopy,atomic absorp-tion,or any other technique that meets the purchaser-requireddetection limits.1This specification is under the jurisdiction of ASTM Committee F01 onElectronics and
12、is under the direct responsibility of Subcommittee F01.17 on SputterMetallization.Current edition approved June 1,2011.Published June 2011.Originallyapproved in 1995.Last previous edition approved in 2003 as F159495(2003).DOI:10.1520/F1594-95R11.2For referenced ASTM standards,visit the ASTM website,
13、www.astm.org,orcontact ASTM Customer Service at serviceastm.org.For Annual Book of ASTMStandards volume information,refer to the standards Document Summary page onthe ASTM website.Copyright ASTM International,100 Barr Harbor Drive,PO Box C700,West Conshohocken,PA 19428-2959.United States1 11.2 Impur
14、ity levels shall be reported using Practice E29.12.Certification12.1 When required by the purchaser,a certificate ofanalysis/compliance that represents the finished material lotshall be provided for each lot by the supplier.12.2 The certificate of analysis/compliance shall state themanufacturers or
15、suppliers name,the suppliers lot number,impurity levels,method of analysis,and any other informationagreed upon between the supplier and the purchaser.12.3 Impurity levels may be reported in the certificate ofanalysis/compliance using actual analytical results for thematerial lot,or by a certificate
16、 of analysis/compliance usingtypical analytical results based upon historical statistical datafor the same process.Certification and the manner of reportingimpurity levels shall be agreed upon between the supplier andthe purchaser.13.Packaging13.1 Each piece shall be enclosed in a shipping carton thatensures product integrity during shipment.14.Keywords14.1 aluminum source;evaporation;thin films;vacuumcoatingASTM International takes no position respecting the validity of any patent rights assert
