1、Designation:F51/F51M00(Reapproved 2014)1Standard Test Method forSizing and Counting Particulate Contaminant In and OnClean Room Garments1This standard is issued under the fixed designation F51/F51M;the number immediately following the designation indicates the year oforiginal adoption or,in the case
2、 of revision,the year of last revision.A number in parentheses indicates the year of last reapproval.Asuperscript epsilon()indicates an editorial change since the last revision or reapproval.1NOTEEditorial changes were made throughout in March 2013.1.Scope1.1 This test method covers the determinatio
3、n of detachableparticulate contaminant 5 m or larger,in and on the fabric ofclean room garments.1.2 This test method does not apply to nonporous fabricssuch as Tyvek(trademarked)or Gortex(trademarked).It onlyapplies to fabrics that are porous such as cotton or polyester.1.3 This test method provides
4、 not only the traditional opticalmicroscopic analysis but also a size distribution and surfaceobscuration analysis for particles on a fine-textured membranefilter or in a tape lift sample.It utilizes transmitted illuminationto render all particles darker than the background for gray leveldetection.P
5、articles collected on opaque plates must be trans-ferred to a suitable membrane filter.1.4 The values stated in either SI units or inch-pound unitsare to be regarded separately as standard.The values stated ineach system may not be exact equivalents;therefore,eachsystem shall be used independently o
6、f the other.Combiningvalues from the two systems may result in non-conformancewith the standard.1.5 This standard may involve hazardous materials,operations,and equipment.This standard does not purport toaddress all of the safety concerns,if any,associated with itsuse.It is the responsibility of the
7、 user of this standard toestablish appropriate safety and health practices and deter-mine the applicability of regulatory limitations prior to use.2.Referenced Documents2.1 ASTM Standards:2E1216 Practice for Sampling for Particulate Contaminationby Tape LiftF25/F25M Test Method for Sizing and Counti
8、ng AirborneParticulate Contamination in Cleanrooms and Other Dust-Controlled Areas2.2 Institute of Environmental Sciences and Technology(IEST)Document:3IEST-RP-CC003.2,Garment System Considerations forCleanrooms and Other Controlled Environments3.Terminology3.1 Definitions:3.1.1 fiber,nparticle long
9、er than 100 m and with alength-to-width ratio exceeding 10:1.3.1.2 micrometre(m),nSI unit of length which is 10-6ofa metre or approximately 0.00004 in.3.1.3 particle size(L)(m)major projected dimension of aparticle.4.Summary of Test Method4.1 Filtered air is drawn through five designated 0.01-m21.5-
10、in.2or approximately 0.01-ft2 areas of a single thicknessof the garment fabric at a rate of 14 L/min 0.5 cfm for aperiod of 1 min for each area.4.2 The air drawn through the garment subsequently passesthrough a membrane filter disk,impinging the entrainedparticles upon the filter surface.4.3 The fil
11、ter disk is then examined microscopically forparticles removed from the garment.4.4 For particles larger than 5 m,use optical analysis.Forparticles smaller than 5 m,use automated image analysis.4.5 Cleaning and counting techniques are in accordancewith those established in Section 10.1This test meth
12、od is under the jurisdiction of ASTM Committee E21 on SpaceSimulation and Applications of Space Technology and is the direct responsibility ofSubcommittee E21.05 on Contamination.Current edition approved Jan.15,2014.Published February 2014.Originallyapproved in 1965.Last previous edition approved in
13、 2007 as F51-00(2007)1.DOI:10.1520/F0051_F0051M-00R14E01.2For referenced ASTM standards,visit the ASTM website,www.astm.org,orcontact ASTM Customer Service at serviceastm.org.For Annual Book of ASTMStandards volume information,refer to the standards Document Summary page onthe ASTM website.3Availabl
14、e from Institute of Environmental Sciences and Technology(IEST),Arlington Place One,2340 S.Arlington Heights Rd.,Suite 100,Arlington Heights,IL 60005-4516,http:/www.iest.org.Copyright ASTM International,100 Barr Harbor Drive,PO Box C700,West Conshohocken,PA 19428-2959.United States1 5.Significance a
15、nd Use5.1 The test method for particulate sizing and numbers ongarments is nondestructive and may be used to evaluate thecontamination levels of fibers and particles on and in cleanroom garments.The test may be used for evaluating thecleanliness levels of new or newly cleaned garments.It alsomay be
16、used to evaluate the extent of fiber and particulatecontamination on garments that have been worn,if necessary.For this application,it is necessary to sample representativeareas of the garment fabric.6.Apparatus6.1 Filter Assembly and Adapter,see Fig.1 and Fig.2.6.1.1 Filter Holder,aerosol open type having an effectivefilter area of 960 6 25 mm2.6.2 Vacuum Pump or Aspirator,capable of operating at apressure of 7 kPa 500 torr with a flow rate of 14 L/min 0.5cfm.6.3 Flowmeter or Orifice,calibrated
