1、Designation:F25/F25M09(Reapproved 2015)Standard Test Method forSizing and Counting Airborne Particulate Contamination inCleanrooms and Other Dust-Controlled Areas1This standard is issued under the fixed designation F25/F25M;the number immediately following the designation indicates the year oforigin
2、al adoption or,in the case of revision,the year of last revision.A number in parentheses indicates the year of last reapproval.Asuperscript epsilon()indicates an editorial change since the last revision or reapproval.1.Scope1.1 This test method covers counting and sizing airborneparticulate matter 5
3、 m and larger(macroparticles).Thesampling areas are specifically those with contamination levelstypical of cleanrooms and dust-controlled areas.1.2 The values stated in either SI units or inch-pound unitsare to be regarded separately as standard.The values stated ineach system may not be exact equiv
4、alents;therefore,eachsystem shall be used independently of the other.Combiningvalues from the two systems may result in non-conformancewith the standard.1.3 This standard does not purport to address all of thesafety concerns,if any,associated with its use.It is theresponsibility of the user of this
5、standard to establish appro-priate safety and health practices and determine the applica-bility of regulatory requirements prior to use.2.Referenced Documents2.1 ASTM Standards:2F50 Practice for Continuous Sizing and Counting of Air-borne Particles in Dust-Controlled Areas and CleanRooms Using Instr
6、uments Capable of Detecting SingleSub-Micrometre and Larger Particles2.2 ISO Standard:ISO 14644-1 Cleanrooms and Associated ControlledEnvironmentsPart 1:Classification of Air Cleanliness32.3 IEST Document:IEST-G-CC1003 Measurement of Airborne Macroparticles(1999)42.4 SAE Document:SAE Abstract ARP-74
7、3,Procedure for the Determination ofParticulate Contamination of Air in Dust-ControlledSpaces by Particle Count Method,August 196253.Terminology3.1 Definitions:3.1.1 airflow:3.1.1.1 unidirectional airflowair flow which has a singulardirection of flow and may or may not contain uniformvelocities of a
8、ir flow along parallel lines.NOTE1Formerly known as laminar airflow.3.1.1.2 non-unidirectional airflowair distribution wherethe supply air entering the room mixes with the internal air bymeans of induction.3.1.2 critical pressurefor an orifice,with a constant up-stream pressure,the downstream pressu
9、re at which the flowwill not increase when the downstream pressure decreases.3.1.3 critical pressure ratiothe ratio of the critical pres-sure of an orifice to the entrance pressure.3.1.4 customerorganization,or the agent thereof,respon-sible for specifying the requirements of a cleanroom or cleanzon
10、e.3.1.5 fiberparticle having an aspect(length-to-width)ratioof 10 or more.3.1.6 macroparticleparticle with an equivalent diametergreater than 5 m.1This test method is under the jurisdiction of ASTM Committee E21 on SpaceSimulation and Applications of Space Technology and is the direct responsibility
11、 ofSubcommittee E21.05 on Contamination.Current edition approved Oct.1,2015.Published November 2015.Originallyapproved in 1963.Last previous edition approved in 2009 as F25 09.DOI:10.1520/F0025_F0025M-09R15.2For referenced ASTM standards,visit the ASTM website,www.astm.org,orcontact ASTM Customer Se
12、rvice at serviceastm.org.For Annual Book of ASTMStandards volume information,refer to the standards Document Summary page onthe ASTM website.3Available from American National Standards Institute(ANSI),25 W.43rd St.,4th Floor,New York,NY 10036,http:/www.ansi.org.4Available from Institute of Environme
13、ntal Sciences and Technology(IEST),Arlington Place One,2340 S.Arlington Heights Rd.,Suite 100,Arlington Heights,IL 60005-4516,http:/www.iest.org.5Available from Society of Automotive Engineers(SAE),400 CommonwealthDr.,Warrendale,PA 15096-0001,http:/www.sae.org.Copyright ASTM International,100 Barr H
14、arbor Drive,PO Box C700,West Conshohocken,PA 19428-2959.United States1 3.1.7 M descriptormeasured or specified concentration ofmacroparticles per cubic metre of air,expressed in terms of theequivalent diameter that is characteristic of the measurementmethod used.3.1.7.1 DiscussionThe M descriptor ma
15、y be regarded asan upper limit for the averages at sampling locations(or as anupper confidence limit,depending upon the number of sam-pling locations used to characterize the cleanroom or cleanzone).M descriptors cannot be used to define airborne particu-late cleanliness classes,but they may be quot
16、ed independentlyor in conjunction with airborne particulate cleanliness classes.3.1.8 occupancy states:3.1.8.1 as-builtcondition where the installation is com-plete with all services connected and functioning but with noadditional equipment,materials,or personnel present.3.1.8.2 at-restcondition where the installation is completewith equipment installed and operating in a manner agreedupon by the customer and supplier,but with no personnelpresent.3.1.8.3 operationalcondition where the installati
