1、 IEC 62047-21 Edition 1.0 2014-06 INTERNATIONAL STANDARD NORME INTERNATIONALE Semiconductor devices Micro-electromechanical devices Part 21:Test method for Poissons ratio of thin film MEMS materials Dispositifs semiconducteurs Dispositifs microlectromcaniques Partie 21:Mthode dessai relative au coef
2、ficient de Poisson des matriaux MEMS en couche mince IEC 62047-21:2014-06(en-fr)colourinsideCopyrighted material licensed to BR Demo by Thomson Reuters(Scientific),Inc.,downloaded on Nov-27-2014 by James Madison.No further reproduction or distribution is permitted.Uncontrolled when printed.THIS PUBL
3、ICATION IS COPYRIGHT PROTECTED Copyright 2014 IEC,Geneva,Switzerland All rights reserved.Unless otherwise specified,no part of this publication may be reproduced or utilized in any form or by any means,electronic or mechanical,including photocopying and microfilm,without permission in writing from e
4、ither IEC or IECs member National Committee in the country of the requester.If you have any questions about IEC copyright or have an enquiry about obtaining additional rights to this publication,please contact the address below or your local IEC member National Committee for further information.Droi
5、ts de reproduction rservs.Sauf indication contraire,aucune partie de cette publication ne peut tre reproduite ni utilise sous quelque forme que ce soit et par aucun procd,lectronique ou mcanique,y compris la photocopie et les microfilms,sans laccord crit de lIEC ou du Comit national de lIEC du pays
6、du demandeur.Si vous avez des questions sur le copyright de lIEC ou si vous dsirez obtenir des droits supplmentaires sur cette publication,utilisez les coordonnes ci-aprs ou contactez le Comit national de lIEC de votre pays de rsidence.IEC Central Office Tel.:+41 22 919 02 11 3,rue de Varemb Fax:+41
7、 22 919 03 00 CH-1211 Geneva 20 infoiec.ch Switzerland www.iec.ch About the IEC The International Electrotechnical Commission(IEC)is the leading global organization that prepares and publishes International Standards for all electrical,electronic and related technologies.About IEC publications The t
8、echnical content of IEC publications is kept under constant review by the IEC.Please make sure that you have the latest edition,a corrigenda or an amendment might have been published.IEC Catalogue-webstore.iec.ch/catalogue The stand-alone application for consulting the entire bibliographical informa
9、tion on IEC International Standards,Technical Specifications,Technical Reports and other documents.Available for PC,Mac OS,Android Tablets and iPad.IEC publications search-www.iec.ch/searchpub The advanced search enables to find IEC publications by a variety of criteria(reference number,text,technic
10、al committee,).It also gives information on projects,replaced and withdrawn publications.IEC Just Published-webstore.iec.ch/justpublished Stay up to date on all new IEC publications.Just Published details all new publications released.Available online and also once a month by email.Electropedia-www.
11、electropedia.org The worlds leading online dictionary of electronic and electrical terms containing more than 30 000 terms and definitions in English and French,with equivalent terms in 14 additional languages.Also known as the International Electrotechnical Vocabulary(IEV)online.IEC Glossary-std.ie
12、c.ch/glossary More than 55 000 electrotechnical terminology entries in English and French extracted from the Terms and Definitions clause of IEC publications issued since 2002.Some entries have been collected from earlier publications of IEC TC 37,77,86 and CISPR.IEC Customer Service Centre-webstore
13、.iec.ch/csc If you wish to give us your feedback on this publication or need further assistance,please contact the Customer Service Centre:csciec.ch.A propos de lIEC La Commission Electrotechnique Internationale(IEC)est la premire organisation mondiale qui labore et publie des Normes internationales
14、 pour tout ce qui a trait llectricit,llectronique et aux technologies apparentes.A propos des publications IEC Le contenu technique des publications IEC est constamment revu.Veuillez vous assurer que vous possdez ldition la plus rcente,un corrigendum ou amendement peut avoir t publi.Catalogue IEC-we
15、bstore.iec.ch/catalogue Application autonome pour consulter tous les renseignements bibliographiques sur les Normes internationales,Spcifications techniques,Rapports techniques et autres documents de lIEC.Disponible pour PC,Mac OS,tablettes Android et iPad.Recherche de publications IEC-www.iec.ch/se
16、archpub La recherche avance permet de trouver des publications IEC en utilisant diffrents critres(numro de rfrence,texte,comit dtudes,).Elle donne aussi des informations sur les projets et les publications remplaces ou retires.IEC Just Published-webstore.iec.ch/justpublished Restez inform sur les nouvelles publications IEC.Just Published dtaille les nouvelles publications parues.Disponible en ligne et aussi une fois par mois par email.Electropedia-www.electropedia.org Le premier dictionnaire en
