1、 IEC 62047-16 Edition 1.0 2015-03 INTERNA TIONAL STA NDA RD NORME INTERNA TIONALE Semiconductor dev ices Micro-electromechanical dev ices Part 16:Test methods for determining residual stresses of MEMS films W afer curv ature and cantilev er beam deflection methods Dispositifs semiconducteurs Disposi
2、tifs microlectromcaniques Partie 16:Mthodes dessai pour dterminer les contraintes rsiduelles des films de MEMS Mthodes de la courbure de la plaquette et de dv iation de poutre en porte-faux IEC 62047-16:2015-03(en-fr)colourinsideCopyright International Electrotechnical Commission THIS PUBLICA TION I
3、S COPYRIGHT PROTECTED Copyright 2015 IEC,Geneva,Switzerland All rights reserved.Unless otherwise specified,no par t of this publication may be reproduced or utilized in any for m or by any means,electronic or mechanical,including photocopying and microfilm,without per mission in writing fr om either
4、 IEC or IECs member National Committee in the country of the requester.If you have any questions about IEC copyright or have an enquiry about obtaining additional r ights to this publication,please contact the address below or your local IEC member National Committee for further infor mation.Droits
5、de repr oduction rservs.Sauf indication contrair e,aucune par tie de cette publication ne peut tre r eproduite ni utilise sous quelque for me que ce soit et par aucun procd,lectr onique ou mcanique,y compr is la photocopie et les microfilms,sans laccord cr it de lIEC ou du Comit national de lIEC du
6、pays du demandeur.Si vous avez des questions sur le copyright de lIEC ou si vous dsirez obtenir des dr oits supplmentaires sur cette publication,utilisez les coordonnes ci-aprs ou contactez le Comit national de lIEC de votre pays de r sidence.IEC Centr al Office Tel.:+41 22 919 02 11 3,rue de Varemb
7、 Fax:+41 22 919 03 00 CH-1211 Geneva 20 infoiec.ch Switzerland www.iec.ch About t he IEC The International Electr otechnical Commission(IEC)is the leading global organization that prepar es and publishes Inter national Standards for all electr ical,electronic and related technologies.A bout IEC publ
8、ications The technical content of IEC publications is kept under constant review by the IEC.Please make sur e that you have the latest edition,a cor rigenda or an amendment might have been published.IEC Cat alogue-webstore.iec.ch/cat alogue The stand-alone application for consulting the entire bibli
9、ographical information on IEC International Standards,Technical Specifications,Technical R eports and other documents.A v ailable for PC,Mac OS,A ndroid Tablets and iPad.IEC publications search-w w w.iec.ch/searchpub The adv anced search enables to find IEC publications by a variety of criteria(refe
10、rence number,text,technical committee,).It also gives information on projec ts,replaced and withdrawn publications.IEC Just Published-webstore.iec.ch/justpublished Stay up to date on all new IEC publications.Just Published details all new publications released.A v ailable online and also once a mont
11、h by email.Elect ropedia-w w w.elect ropedia.org The worlds leading online dic tionary of elec tronic and electrical terms containing more than 30 000 terms and definitions in English and French,with equiv alent terms in 15 additional languages.Also known as the International Elec trotechnical Vocab
12、ulary (IEV)online.IEC Glossar y-st d.iec.ch/glossary More than 60 000 electrotechnical terminology entries in English and French extracted from the Terms and Definitions clause of IEC publications issued since 2002.Some entries hav e been collected from earlier publications of IEC TC 37,77,86 and CI
13、SPR.IEC Customer Service Cent re-webstore.iec.ch/csc If y ou wish to giv e us y our feedback on this publication or need further assistance,please contact the Customer Serv ice Centre:csciec.ch.A propos de lIEC La Commission Electrotechnique Internationale(IEC)est la pr emire or ganisation mondiale
14、qui labore et publie des Nor mes inter nationales pour tout ce qui a trait llectr icit,llectronique et aux technologies apparentes.A propos des publications IEC Le contenu technique des publications IEC est constamment r evu.Veuillez vous assurer que vous possdez ldition la plus rcente,un corr igend
15、um ou amendement peut avoir t publi.Cat alogue IEC-webstore.iec.ch/cat alogue Application autonome pour consulter tous les renseignements bibliographiques sur les Normes internationales,Spcifications techniques,Rapports techniques et autres documents de lIEC.Disponible pour PC,Mac OS,tablettes A ndr
16、oid et iPad.R echerche de publications IEC-w w w.iec.ch/searchpub La recherche avance permet de t rouver des publications IEC en utilisant diffrents critres(numro de rfrence,texte,comit dtudes,).Elle donne aussi des informations sur les projets et les publications remplac es ou retires.IEC Just Published-webstore.iec.ch/justpublished Restez inform sur les nouvelles publications IEC.Just Published dtaille les nouv elles publications parues.Disponible en ligne et aussi une fois par mois par email.
