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9、ciec.ch.Copyrighted material licensed to BR Demo by Thomson Reuters(Scientific),Inc.,downloaded on Nov-27-2014 by James Madison.No further reproduction or distribution is permitted.Uncontrolled when printed.IEC/TR 62834 Edition 1.0 2013-09 TECHNICAL REPORT IEC nanoelectronics standardization roadmap
10、 INTERNATIONAL ELECTROTECHNICAL COMMISSION V ICS 07.030 PRICE CODE ISBN 978-2-8322-1100-7 Registered trademark of the International Electrotechnical Commission Warning!Make sure that you obtained this publication from an authorized distributor.colourinsideCopyrighted material licensed to BR Demo by
11、Thomson Reuters(Scientific),Inc.,downloaded on Nov-27-2014 by James Madison.No further reproduction or distribution is permitted.Uncontrolled when printed.2 TR 62834 IEC:2013(E)CONTENTS FOREWORD.4 INTRODUCTION.6 1 Scope.7 2 Background.8 2.1 General.8 2.2 Classification of nanotechnology.9 General.9
12、2.2.1 Nanomaterials.9 2.2.2 Nanoscale devices.9 2.2.3 Nano-biotechnology.9 2.2.4 Nanofabrication process Equipment Measurement.9 2.2.53 Current status and prospects.9 3.1 Related markets.9 3.2 Technology development directions for nanomaterials.10 General.10 3.2.1 World leading group status.11 3.2.2
13、 Nanopore materials.12 3.2.3 Nanocomposite materials.12 3.2.43.3 Overall technology status and prospects of nanoelectronic devices.12 4 Nanomaterials technology,scenario and standardization roadmap.13 4.1 Technology.13 Classification of nanomaterials.13 4.1.1 Standardization items of zero dimensiona
14、l nanomaterials.14 4.1.2 Standardization items of one-dimensional nanomaterials.15 4.1.3 Standardization items of two-dimensional nanomaterials.16 4.1.4 Standardization items of three-dimensional nanomaterial.17 4.1.54.2 Scenarios.18 Scenario for nanoparticles(or nanopowders).18 4.2.1 Scenario for q
15、uantum dots.18 4.2.2 Scenario for carbon nanotubes.19 4.2.3 Scenario for nanowires.20 4.2.4 Scenario for nanostructured thin films.20 4.2.5 Scenario for sheet resistance characterization of CNT films.21 4.2.6 Scenario for wear resistance and exposure test of CNT films.21 4.2.7 Scenario for thermal c
16、haracterization of CNT films.22 4.2.8 Scenario for graphene.22 4.2.9 Scenario for nanopores.23 4.2.10 Scenario for nanocomposite materials.23 4.2.114.3 Roadmap of standardization of nanomaterials(2009-2020).24 5 Nanoelectronic devices technology,scenario and standardization roadmap.24 5.1 Technology.24 Nanoscale non-volatile memory devices.24 5.1.1 New nanomaterial or new nanostructure for nanoelectronic 5.1.2devices.24 Three-dimensional nanoscale transistors.24 5.1.3 Single electron transist
