1、 IEC/TR 62632 Edition 1.0 2013-09 TECHNICAL REPORT Nanoscale electrical contacts and interconnects IEC/TR 62632:2013(E)Copyrighted material licensed to BR Demo by Thomson Reuters(Scientific),Inc.,downloaded on Nov-27-2014 by James Madison.No further reproduction or distribution is permitted.Uncontro
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9、Copyrighted material licensed to BR Demo by Thomson Reuters(Scientific),Inc.,downloaded on Nov-27-2014 by James Madison.No further reproduction or distribution is permitted.Uncontrolled when printed.IEC/TR 62632 Edition 1.0 2013-09 TECHNICAL REPORT Nanoscale electrical contacts and interconnects INT
10、ERNATIONAL ELECTROTECHNICAL COMMISSION W ICS 07.030 PRICE CODE ISBN 978-2-8322-1113-7 Registered trademark of the International Electrotechnical Commission Warning!Make sure that you obtained this publication from an authorized distributor.Copyrighted material licensed to BR Demo by Thomson Reuters(
11、Scientific),Inc.,downloaded on Nov-27-2014 by James Madison.No further reproduction or distribution is permitted.Uncontrolled when printed.2 TR 62632 IEC:2013(E)CONTENTS FOREWORD.4 INTRODUCTION.6 1 Scope.9 2 Normative references.9 3 Terms and definitions.9 4 Framework of the technical report:.10 5 A
12、nalysis of state-of-the-art nanoscale contacts and nano-interconnect technologies.12 5.1 Nanotubes and nanowires.12 Type and configuration of the nanoscale contacts formed.12 5.1.1 Requirements of the nanoscale contacts in products.12 5.1.2 Fabrication technologies,processes,and process controls 5.1
13、.3used to make the nanoscale contacts.13 Characterization techniques used to quantify a nanoscale 5.1.4contact.14 Functionality and performance of the nanoscale contacts.14 5.1.5 Reliability of the nanoscale contacts in the product.17 5.1.6 Expectations of when the product and the associated 5.1.7na
14、noscale contacts will reach the market.17 5.2 Via interconnects using CNTs and CNFs.17 Type and configuration of the nanoscale interconnects formed.17 5.2.1 Requirements of the nanoscale interconnects in products.17 5.2.2 Fabrication technologies,processes,and process controls 5.2.3used to make the
15、nanoscale interconnects.17 Characterization techniques used to quantify a nanoscale 5.2.4interconnect.18 Functionality and performance of the nanoscale interconnects.18 5.2.5 Reliability of the nanoscale interconnects in the product.19 5.2.6 Expectations of when the product and the associated 5.2.7n
16、anoscale contacts will reach the market.19 5.3 Surface(lateral)interconnects using CNTs and CNFs.19 Type and configuration of the nanoscale interconnects formed.19 5.3.1 Requirements of nanoscale interconnects in products.20 5.3.2 Fabrication technologies,processes,and process controls 5.3.3used to make the nanoscale interconnects.20 Characterization techniques used to quantify a nanoscale 5.3.4interconnects.20 Functionality and performance of the nanoscale interconnects.20 5.3.5 Reliability
