1、 IEC TS 61994-4-4 Edition 3.0 2018-11 TECHNICAL SPECIFICATION Piezoelectric,dielectric and electrostatic devices and associated materials for frequency control,selection and detection Glossary Part 4-4:Piezoelectric materials Single crystal wafers for surface acoustic wave(SAW)devices IEC TS 61994-4
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11、tatic devices and associated materials for frequency control,selection and detection Glossary Part 4-4:Piezoelectric materials Single crystal wafers for surface acoustic wave(SAW)devices INTERNATIONAL ELECTROTECHNICAL COMMISSION ICS 01.040.31;31.140 ISBN 978-2-8322-6178-1 Registered trademark of the
12、 International Electrotechnical Commission Warning!Make sure that you obtained this publication from an authorized distributor.2 IEC TS 61994-4-4:2018 IEC 2018 CONTENTS FOREWORD.3 1 Scope.5 2 Normative references.5 3 There are no normative references in this document.Terms and definitions.5 3.1 Sing
13、le crystals for SAW wafer.5 3.2 Terms and definitions related to LN and LT crystals.6 3.3 Terms and definitions related to all crystals.7 3.4 Flatness.7 3.5 Definitions of appearance defects.10 3.6 Other terms and definitions.11 Bibliography.14 Figure 1 Example of site distribution for LTV measureme
14、nt.7 Figure 2 LTV value of each site.8 Figure 3 Schematic diagram of Sori.9 Figure 4 Wafer sketch and measurement points for TV5 determination.9 Figure 5 Schematic diagram of TTV.10 Figure 6 Schematic diagram of warp.10 Table 1 Description of wafer orientations.12 IEC TS 61994-4-4:2018 IEC 2018 3 IN
15、TERNATIONAL ELECTROTECHNICAL COMMISSION _ PIEZOELECTRIC,DIELECTRIC AND ELECTROSTATIC DEVICES AND ASSOCIATED MATERIALS FOR FREQUENCY CONTROL,SELECTION AND DETECTION GLOSSARY Part 4-4:Piezoelectric materials Single crystal wafers for surface acoustic wave(SAW)devices FOREWORD 1)The International Elect
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